Is the Registry Between Adjacent Graphene Layers Grown on C-Face SiC Different Compared to That on Si-Face SiC

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4H-SiC Epitaxial Layers Grown on on-axis Si-face Substrate

We report on the growth of 4H-SiC epitaxial layer on Si-face polished nominally on-axis 2” full wafer, using Hot-Wall CVD epitaxy. The polytype stability has been maintained over the larger part of the wafer, but 3C inclusions have not been possible to avoid. Special attention has given to the mechanism of generation and propagation of 3C polytype in 4H-SiC epilayer. Different optical and struc...

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Soft X-ray Exposure Promotes Na Intercalation in Graphene Grown on Si-Face SiC

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ژورنال

عنوان ژورنال: Crystals

سال: 2013

ISSN: 2073-4352

DOI: 10.3390/cryst3010001